Clean Room

  • E-beam evaporator

  • Soft reactive ion etching chamber

  • Spin coater

  • Mask aligner

  • Rapid thermal annealer

  • Surface profilometer

  • Micro-wedge bonder

  • Plasma-enhanced chemical vapor deposition chamber

  • Wet chemical stations

  • Device manipulation, cleaving and mounting stages

Electron Microscopy

  • Field Emission - Scanning Electron Microscope (FE-SEM) Zeiss Sigma (Assing)

  • Energy Dispersive Spectroscopy (EDS/EDX) Microanalysis (Oxford Instruments)

  • Electron Beam Litography (Raith)

Ultrafast Lasers

High Power Lasers

  • 2.5 kW CO2 laser Rofin DC025

  • 3-axis Robotic Cell for welding and cutting

  • 2 kW Fiber Laser Rofin FL020

  • RTM welding and cutting cell equipped with:

    • Aerotech Gantry System

    • Precitec welding and cutting heads

  • Fast Imaging Camera (Optronis CR5000) with laser illumination (Cavilux HF)


  • Laser sensors for mechatronics including several linear and angular high precision robotic stages

  • Quantum cascade laser based optoacoustic cells for trace gas detection

  • Optical sensors for laser welding monitoring and control

Devices and materials Characterization

  • Electrical (pulsed, cw) and IR optical characteristics

  • FT-IR spectroscopy

  • Micro-probe Raman and photoluminescence

  • Photoacoustic spectroscopy