Facilities
Clean Room
E-beam evaporator
Soft reactive ion etching chamber
Spin coater
Mask aligner
Rapid thermal annealer
Surface profilometer
Micro-wedge bonder
Plasma-enhanced chemical vapor deposition chamber
Wet chemical stations
Device manipulation, cleaving and mounting stages
Electron Microscopy
Field Emission - Scanning Electron Microscope (FE-SEM) Zeiss Sigma (Assing)
Energy Dispersive Spectroscopy (EDS/EDX) Microanalysis (Oxford Instruments)
Electron Beam Litography (Raith)
Ultrafast Lasers
Fiber CPA laser system (Active Fiber Systems GmbH mod. Sci-Series)
Picosecond Fiber laser (prototype developed at the IAP-FSU Jena)
Nanosecond laser (Quantel BRIO)
High Power Lasers
2.5 kW CO2 laser Rofin DC025
3-axis Robotic Cell for welding and cutting
2 kW Fiber Laser Rofin FL020
RTM welding and cutting cell equipped with:
Aerotech Gantry System
Precitec welding and cutting heads
Fast Imaging Camera (Optronis CR5000) with laser illumination (Cavilux HF)
Sensors
Laser sensors for mechatronics including several linear and angular high precision robotic stages
Quantum cascade laser based optoacoustic cells for trace gas detection
Optical sensors for laser welding monitoring and control
Devices and materials Characterization
Electrical (pulsed, cw) and IR optical characteristics
FT-IR spectroscopy
Micro-probe Raman and photoluminescence
Photoacoustic spectroscopy