Clean Room
- E-beam evaporator
- Soft reactive ion etching chamber
- Spin coater
- Mask aligner
- Rapid thermal annealer
- Surface profilometer
- Micro-wedge bonder
- Plasma-enhanced chemical vapor deposition
chamber
- Wet chemical stations
- Device manipulation, cleaving and
mounting stages
|
|
| Electron Microscopy
- Field Emission - Scanning Electron Microscope (FE-SEM) Zeiss Sigma (Assing)
- Energy Dispersive Spectroscopy (EDS/EDX) Microanalysis (Oxford Instruments)
- Electron Beam Litography (Raith)
|
|
|
Ultrafast Lasers
High Power Lasers - 2.5 kW CO2
laser Rofin DC025
- 3-axis
Robotic Cell for welding and cutting
- 2 kW Fiber Laser Rofin FL020
- RTM welding and cutting cell
equipped with:
- Aerotech Gantry System
- Precitec welding and cutting heads
- Fast Imaging Camera (Optronis CR5000) with laser
illumination (Cavilux HF)
| | |
Sensors - Laser sensors for mechatronics
including several linear and angular high precision robotic stages
- Quantum cascade laser based
optoacoustic cells for trace gas detection
- Optical sensors for laser welding
monitoring and control
| | |
Devices and materials
Characterization - Electrical
(pulsed, cw) and IR optical characteristics
- FT-IR
spectroscopy
- Micro-probe
Raman and photoluminescence
- Photoacoustic
spectroscopy
| | |
| 
