Clean Room
  • E-beam evaporator
  • Soft reactive ion etching chamber
  • Spin coater
  • Mask aligner
  • Rapid thermal annealer
  • Surface profilometer
  • Micro-wedge bonder
  • Plasma-enhanced chemical vapor deposition chamber
  • Wet chemical stations
  • Device manipulation, cleaving and mounting stages
Electron Microscopy
  • Field Emission - Scanning Electron Microscope (FE-SEM) Zeiss Sigma (Assing)
  • Energy Dispersive Spectroscopy (EDS/EDX) Microanalysis (Oxford Instruments)
  • Electron Beam Litography (Raith)

Ultrafast Lasers
High Power Lasers
  • 2.5 kW CO2 laser Rofin DC025
  • 3-axis Robotic Cell for welding and cutting
  • 2 kW Fiber Laser Rofin FL020
  • RTM welding and cutting cell equipped with:
    • Aerotech Gantry System
    • Precitec welding and cutting heads
  • Fast Imaging Camera (Optronis CR5000) with laser illumination (Cavilux HF)
  • Laser sensors for mechatronics including several linear and angular high precision robotic stages
  • Quantum cascade laser based optoacoustic cells for trace gas detection
  • Optical sensors for laser welding monitoring and control
Devices and materials Characterization
  • Electrical (pulsed, cw) and IR optical characteristics
  • FT-IR spectroscopy
  • Micro-probe Raman and photoluminescence
  • Photoacoustic spectroscopy